Inline PSG Removal Equipment
Product Name: Inline PSG Removal Equipment
Function: Removing Phosphorus Silicon Glass (PSG) from Photovoltaic Solar Cells
Process Flow: Water Film→HF→Rinse→Drying
Features: High-speed precision liquid-carrying etching roller to avoid under-etching or over-etching at the edges; precise water film control to ensure complete coverage without dripping; real-time monitoring of solution conductivity to ensure etching process stability; stable production at 4.5m/min, less friction, longer consumable life.
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Product Name |
Inline PSG Removal Equipment |
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Model |
KSPSG |
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Route Application |
TOPCON、PERC、XBC |
|
Function |
Removing Phosphorus Silicon Glass (PSG) from Photovoltaic Solar Cells |
|
Process Flow |
Water Film→HF→Rinse→Drying |
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Compatible Wafer |
12 lanes for 182mm; 10 lanes for 210/230mm, compatible with various sizes wafers. |
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Lane Number |
182mmx182mm: 12 lanes (6+6 configuration); 210-230mm: 10 lanes (5+5 configuration) |
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Operation Speed |
2-5m/min Adjustable |
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Capacity |
182: ≥16000 pcs/hour; 210: ≥12500 pcs/hour |
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Breakage Rate |
Breakage rate <0.01% (Silicon wafer thickness ≥130um) |
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Power Consumption/ Voltage |
~33KW/380V |
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Features |
High-speed precision liquid-carrying etching roller to avoid under-etching or over-etching at the edges; precise water film control to ensure complete coverage without dripping; real-time monitoring of solution conductivity to ensure etching process stability; stable production at 4.5m/min, less friction, longer consumable life. |